CLOGGING PREVENTION VAPORIZER FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A clogging prevention vaporizer for manufacturing a semiconductor device capable of promoting vaporizing efficiency and minimizing a clogging generation by increasing a contacting area of a liquid source and a vaporizing terminal is provided. CONSTITUTION: The clogging prevention vaporizer for manufacturing a semiconductor device comprising: a reactive chamber(101), a vaporizing action is generated therein; a liquid source supply pipe(103) for supplying a liquid source into the reactive chamber(101) and having a height to come in touch with an upper face of a vaporizing member(7); a vaporizing member(7) contacted with the liquid source form the liquid source supply pipe(103); metal frits(107a and 107b) for forming the vaporizing member(7), each of the metal frits(107a and 107b) having a glass bead shape or a powder form; a conveying gas supply pipe (105) for supply conveying gas which conveys the vaporizing gas vaporized in the metal frits(107a and 107b); and a discharge pipe(109) for supplying the vaporizing gas to the reactive chamber(101).