| 发明名称 |
Heater sealed with carbon wire heating element |
| 摘要 |
The heater sealed with a carbon wire heating element of the present invention has a carbon wire heating element sealed within a quartz glass member, said carbon wire being prepared by knitting carbon single fibers into a knitted cord or a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and a crystallite size Lc (002) thereof being 4.0 nm or more.
|
| 申请公布号 |
US2002001460(A1) |
申请公布日期 |
2002.01.03 |
| 申请号 |
US20010864196 |
申请日期 |
2001.05.25 |
| 申请人 |
TOSHIBA CERAMICS CO., LTD. & TOKYO ELECTRON LIMITED |
发明人 |
SEKO SUNAO;KONN TOMIO;NAGATA TOMOHIRO;SAITO NORIHIKO;YOKOYAMA HIDEYUKI;KOBAYASHI MASAKAZU;SAITO TAKANORI;NAKAO KEN |
| 分类号 |
H05B3/84;D04B21/20;D04C1/02;D04C1/06;H01L21/00;H01L21/324;H05B3/02;H05B3/14;H05B3/44;(IPC1-7):H05B3/28;H05B3/48 |
主分类号 |
H05B3/84 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
