| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for improving fog correction accuracy. SOLUTION: This drawing apparatus 100 comprises a fog correcting irradiation computing unit 114 for computing amount of fog correcting irradiation including influence of the proximity effect in the electron beam drawing, a proximity effect correcting irradiation computing unit 116 for computing amount of proximity effect correcting irradiation for correcting the proximity effect mentioned above, a correcting irradiation combining unit 118 for combining amount of fog correcting irradiation and amount of proximity effect correcting irradiation, and a drawing unit 150 for drawing a sample 101 on the basis of the synthesized amount of correcting irradiation. COPYRIGHT: (C)2007,JPO&INPIT
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