| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of obtaining a high-resolution and high-contrast concavoconvex image of a sample surface. SOLUTION: A positive voltage for accelerating primary electron beams is impressed, and an electric field shielding board, a magnetic field shielding board, or an electromagnetic field shielding board is arranged on a top part of an objective lens. With the use of the scanning electron microscope of such a structure, a sample image is obtained. COPYRIGHT: (C)2007,JPO&INPIT
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