| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment method and a plasma treatment apparatus which are capable of efficiently performing plasma treatment to fine particles.SOLUTION: After hermetically sealing a plurality of fine particles 1 into a portable-type container 3 together with plasma gas 2 such as argon gas and nitrogen gas, the container 3 is placed in a plasma treatment apparatus 50, electric field is applied from outside the container 3, plasma is generated in the container 3 to perform plasma treatment to the fine particle 1. In such occasion, vibration is added to the container 3, and the fine particles 1 are floated in the container 3. Herein, the container 3 is a bag 30 made of flexible sheet, and a plurality of the bags are connected with each other. Therefore, plasma treatment is performed to a plurality of containers 3 (bags 30) sequentially.SELECTED DRAWING: Figure 1 |
