| 摘要 |
The present invention relates to a device for monitoring a fire of semiconductor or display manufacturing equipment by using a thermal image sensor, capable of sensing heat of a power supply device supplying power to the semiconductor or display manufacturing equipment by using the thermal image sensor and preventing the fire in advance by monitoring heat generated in the power supply device in real time. Disclosed is the device for monitoring a fire of semiconductor or display manufacturing equipment by using the thermal image sensor comprising: a process device which performs a semiconductor or display manufacturing process; the power supply device which supplies the power to the process device; the thermal image sensor which sets an area having the heat in at least one device among power supply devices, senses the heat, and generates a thermal image sensing signal; and a monitoring device which receives the thermal image sensing signal through a network or serial communication, compares a predetermined temperature, and monitors the fire of an area in which a thermal image sensing camera is installed. |
