发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To set a withstand voltage at a level of reducing to a degree causing no problems for practical use or blocking a punch-through current between neighboring wells to reduce an area required by well isolation.SOLUTION: A semiconductor device 30 includes a high-concentration deep P region 33 provided in a deep layer of a P-type substrate 31 between neighboring deep N wells 32a and 32b to improve a withstand voltage between the neighboring deep N wells 32a and 32b. By doing this, a punch-through current passing through the P-type substrate 31 between the neighboring deep N wells 32a and 32b, and a punch-through current passing through a deep layer of the P-type substrate 31 between neighboring N wells 34a and 34b in a surface layer can be reduced to a large extent or blocked.SELECTED DRAWING: Figure 1
申请公布号 JP2016111096(A) 申请公布日期 2016.06.20
申请号 JP20140245260 申请日期 2014.12.03
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 发明人 OGASAWARA YASUHIRO;SEKIKAWA TOSHIHIRO;KOIKE HANPEI
分类号 H01L21/761;H01L21/265;H01L21/266 主分类号 H01L21/761
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