| 主权项 |
1. A chemical liquid supply system comprising:
a filter for filtering a chemical liquid; a chemical liquid pump, for performing suction and discharge of the chemical liquid according to a volume change of a pump chamber caused by a pressure change in an operation chamber partitioned by a flexible member from the pump chamber; a first opening/closing valve provided at a first side of the chemical liquid pump; a second opening/closing valve provided at a second side of the chemical liquid pump; a pressure sensor for detecting a pressure in the operation chamber; a flow rate sensor for detecting an exhaust flow rate; a first pressure adjustment unit for adjusting an exhaust pressure; and a controller for controlling the first pressure adjustment unit based on detected signals from the pressure sensor and the flow rate sensor, the controller including: a data storage unit for storing detected pressure data in the operation chamber and detected exhaust flow rate data; and a supply side liquid pressure data storage unit for storing liquid pressure variation data depending on a type and viscosity of the chemical liquid at the first side of the chemical liquid pump, wherein the filter, the chemical liquid pump, the first opening/closing valve and the second opening/closing valve are provided in a chemical liquid passageway for connecting a chemical liquid discharge unit and a chemical liquid tank storing therein the chemical liquid, the chemical liquid supplied from the chemical liquid tank is filtered by the filter according to opening/closing operations of the first and second opening/closing valves and a supply/exhaust operation of the chemical liquid pump, and then, the chemical liquid is discharged from the chemical liquid discharge unit, the pressure sensor, the flow rate sensor and the first pressure adjustment unit are provided on a passage connected to the operation chamber of the chemical liquid pump, the pressure sensor detects a pressure in the operation chamber when the first opening/closing valve is opened at a time of starting a replenishment of the chemical liquid into the chemical liquid pump, the flow rate sensor detects an exhaust flow rate exhausted from the operation chamber, when a first replenishment is started, the controller controls a pressure in the operation chamber to be equal to a liquid pressure at the first side of the chemical liquid pump, and when a replenishment is started after a second time of the replenishment, a compensated pressure value is calculated by using the detected pressure data and the detected exhaust flow rate data stored in the data storage unit and the liquid pressure variation data depending on the type and the viscosity of the chemical liquid stored in the supply side liquid pressure data storage unit, and the controller controls the pressure in the operation chamber based on the calculated compensated pressure value, and wherein the passage includes: a main passage connected to the operation chamber of the chemical liquid pump; an exhaust passage branched from the main passage and connected to a depressurization source; and a pressurization passage branched from the main passage and connected to a pressurization source, the flow rate sensor is provided on the main passage, the first pressure adjustment unit is provided on the exhaust passage, a second pressure adjustment unit is provided on the pressurization passage, the first pressure adjustment unit and the second pressure adjustment unit are combined to each other as a combined pressure adjustment unit, the pressure sensor is provided in the combined pressure adjustment unit, the controller is configured to control said exhaust pressure and a pressing pressure of the combined pressure adjustment unit, and the combined pressure adjustment unit includes: a common communication block selectively connected with the exhaust passage or the pressurization passage; two stop blocks configured to block communication between the main passage and the exhaust passage or communication between the main passage and the pressurization passage; and an electromagnetic switching unit configured to control a switching operation between the common communication block and the two stop blocks. |
