| 主权项 |
1. A photoresist comprising at least one complex (BD2)zM(La)n(Lb)o(Lc)p(Ld)q or (A)yM(Le)n(Lf)o(Lg)p(Lh)q, wherein:
M is a metal having a coordination number of Q, wherein M is selected from zirconium, manganese, aluminum, vanadium, titanium, chromium, manganese, iron, cobalt, copper, zinc, gallium, germanium, arsenic, molybdenum, ruthenium, rhodium, silver, cadmium, indium, tin, antimony, tellurium, iodine, thulium, hafnium, tantalum, tungsten, rhenium, osmium, iridium, gold, mercury, thallium, lead, and bismuth; Q is an integer selected from 2, 3, 4, 5, 6, 7, or 8; BD2 is oxalate or carbonate; La, Lb, Lc and Ld are ligands, each having a denticity of, respectively, wa, wb, wc and wd; z is 1, 2 or 3; n, o, p, and q are independently zero, one or two; the sum of (n·wa) plus (o·wb) plus (p·wc) plus (q·wd) is equal to (Q minus 2z); A is selected in each instance from azide and (—NO2); Le, Lf, Lg and Lh are ligands, each having a denticity of, respectively, we, wf, wg and wh; y is any integer up to and including Q; and the sum of (n·we) plus (o·wf) plus (p·wg) plus (q·wh) is equal to (Q minus y); wherein said complex is balanced by a counter ion, if necessary. |
