SUBSTRATE CHUCK, SUBSTRATE BONDING APPARATUS

摘要

PURPOSE: A substrate chuck and a glass laminating apparatus for adhering to a substrate by using adhesion are provided to improve the fabrication efficiency and utilization ratio by easily performing maintenance and manufacturing the substrate at low cost. CONSTITUTION: A table is installed in a chamber. A base plate(310) is installed in the table. An adhesive(320) is installed in the base plate. A substrate separation unit(330) is around the adhesive. The substrate is protruded to the outside of the base plate in order to separate the substrate from the adhesive. The substrate separation is restored after the separation of substrate by the base plate.