| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober in which the throughput is improved at each measurement section, even if the inspection environment conditions are changed.SOLUTION: A prober 10 includes a conveyance article housing section 12 for housing a plurality of conveyance articles (wafer or probe card PC), a plurality of measurement sections 14 having an environment different from that of the conveyance article housing section 12, and arranged to face the conveyance article housing section 12, at a predetermined distance therefrom, and a conveyance unit 16 for conveying the conveyance article between the conveyance article housing section 12 and measurement sections 14. The conveyance unit 16 has environment control means for controlling the conveyance environment so as to match the environment of the conveyance article housing section 12 and measurement section 14.SELECTED DRAWING: Figure 1 |
