MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19970153015-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH10326831(A)	申请公布日期	1998.12.08
申请号	JP19970153015	申请日期	1997.05.26
申请人	OKI ELECTRIC IND CO LTD	发明人	KANAMORI JUN
分类号	H01L21/28;H01L21/302;H01L21/3065;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/768;H01L21/306	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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