| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small vacuum pump which is very simple in structure, and to provide a small turbo molecular vacuum pump which is easy in the manufacture and at low costs. <P>SOLUTION: The small turbo molecular vacuum pump 1 is driven with a cup type motor 8. A cup type rotor of the motor is suitably integrated with a rotating wing 14 of the pump. For example, a corresponding pumping stage such as a Holweck stage may be specified. Stators 11 and 12 of the pumping stage are suitably obtained by stacking stator rings 11' and 12'. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
