MICRO-ELECTRO-MECHANICAL SYSTEMS SWITCH

摘要

An MEMS(Micro Electro Mechanical Systems) switch is provided to reduce a contact resistance as well as an insertion loss by enhancing a contact structure of a signal line. An MEMS switch includes a substrate(101), a fixed signal line(110), a moving signal line(130), and a piezoelectric actuator(150). The fixed signal line is formed on one side of center of the substrate. The moving signal line is formed on an other side of the center of the substrate having a predetermined gap(G1) from an upper surface of the fixed signal line. The piezoelectric actuator lowers a free end of the moving signal line to connect the moving signal line to the fixed signal line and includes a first electrode(151), a piezoelectric layer(153), a second electrode(155), and a connection layer(157). The piezoelectric layer is formed on the first electrode. The second electrode is formed on the piezoelectric layer. The connection layer is formed on the second electrode and is connected to an upper surface of the moving signal line.