OPTICAL INTEGRATOR SYSTEM, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

An optical integrator system comprises a first optical integrator (111) having a plurality of first wavefront dividing elements (111a) arranged in juxtaposition along a predetermined direction (z-direction), and a second optical integrator (113) having a plurality of second wavefront dividing elements (113a) arranged in juxtaposition along the predetermined direction (z-direction), which are arranged in order from the entrance side of light. The first wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted in parallel with the optical axis. The second wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted obliquely to the optical axis.