| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inhibiting plug oxidation during the manufacturing of a capacitor. SOLUTION: A ferroelectric capacitor device is provided with a substrate 5, a plug 4 passing through the substrate 5, an electrically insulating layer 6 formed on the substrate 5, a first electrode 8 formed on the electrically insulating layer 6, a ferroelectric layer 10 formed on the first electrode 8, and a second electrode 12 formed on the ferroelectric layer 10. The first electrode 8 is electrically connected to the plug 4 through the electrically insulating layer 6 and an inter-layer insulating film 34 is formed on the electrical connection portion. COPYRIGHT: (C)2009,JPO&INPIT
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