BASE MEMBER, ITS MANUFACTURING METHOD, STAGE DEVICE, AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a base member capable of suppressing air fluctuation due to a down flow, its manufacturing method, a stage device, and an exposure device.

SOLUTION: A guide face to guide a moving object 22 to one face 24a is formed in this base member. This base member is equipped with a suction part 1 to attract gas around one face side, and an adjusting device 2 to adjust the flow of the gas on one face side.

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