Lid opening/closing system for closed container and substrate processing method using same

摘要

Adjacent to an opening portion in an FISM system is provided an enclosure that encloses the operation space of a door and has a second opening portion opposed to the opening portion. A curtain nozzle is provided above the upper edge of the opening portion in the upper portion in the enclosure. A purge gas is supplied from the curtain nozzle along a direction from the upper edge to the lower edge of the opening portion. In addition, a gas outlet through which the purge gas flows from the interior of the enclosure out into the exterior is provided on the wall of the enclosure to which the purge gas flowing in the above described direction is directed, whereby an increase in the partial pressure of oxidizing gases in the interior of the FOUP is prevented.

主权项

1. A method of processing an object to be stored a storage container having a substantially box-like body with an opening on one side thereof, and a detachable lid that closes said opening, comprising:
opposing said opening of the storage container to a first opening portion provided on a wall that defines a particle-controlled mini-environment and a second mini-environment isolated from the mini-environment, wherein said first opening portion leads to the second mini-environment and wherein a second opening portion connects said second mini-environment to said mini-environment; holding said lid by a door provided in said second mini-environment and that closes said first opening portion; driving said door, while holding said lid, to move from a state where the first opening portion is closed to a retracted posture where said first opening portion is opened and said second opening portion is closed by said door, and to then move in said second mini-environment to a position where both of the first opening portion and the second opening portion are opened, while maintaining the retracted posture; bringing said object into or out of said storage container and into or out of said mini-environment via said second mini-environment, by moving said object through said opening, said first opening portion and said second opening portion; and while said door is in the retracted posture where said first opening portion is opened and said second opening portion is closed, causing a gas to flow downward in said second mini-environment from an upper edge to the lower edge of said first opening portion, and then to flow from said second mini-environment into said mini-environment at a location below said second opening portion.