| 摘要 |
A method for producing a plurality of semiconductor components is provided, wherein a semiconductor layer sequence having a first semiconductor layer, a second semiconductor layer and an active region is applied on a substrate. A contact structure is formed for electrically contacting the first and the second semiconductor layers. An auxiliary substrate is applied on the semiconductor layer sequence, so that the semiconductor layer sequence is arranged between the auxiliary substrate and the substrate. In a subsequent step, the substrate is removed from the semiconductor layer sequence. The semiconductor layer sequence is structured into a plurality of semiconductor bodies by forming at least one trench separating the semiconductor bodies. An anchoring layer is formed to cover the trench and vertical surfaces of the semiconductor bodies. A plurality of tethers is formed by structuring the anchoring layer in regions covering the trench. The auxiliary substrate is locally detached from the semiconductor bodies, wherein the tethers remain attached to the auxiliary substrate. At least one semiconductor body is selectively picked up by separating the tethers from the auxiliary substrate. Moreover, a semiconductor component produced by said method is provided. |
