Method of repairing substrate

摘要

A method of repairing a substrate that may prevent a metal layer from being corroded. A substrate including a metal layer and an insulating layer on the metal layer is first provided. Then, a laser beam having a wavelength range having a high transmittance with respect to the insulating layer is irradiated to selectively remove a portion of the metal layer. Also, a first laser beam is irradiated to remove a portion of the metal layer and a portion of the insulating layer, and then a second laser beam is irradiated onto side surfaces of the exposed insulating layer to melt the insulating layer, thereby forming a corrosion preventing layer covering the metal layer.

主权项

1. A method of repairing a substrate, the method comprising:
providing a substrate including a metal layer and an insulating layer in direct contact with the metal layer; and irradiating a laser beam having a first wavelength range in a direction perpendicular to the substrate to selectively remove a portion of the metal layer while leaving the insulating layer intact.