发明名称 METHOD OF ELIMINATING ENGRAVING DEFECT FROM METALLIC FILM DEPOSITED ON FLEXIBLE CARRIER
摘要 <P>PROBLEM TO BE SOLVED: To provide a method by which an engraving edge is not injured with respect to an effective elimination method of an engraving defect, in particular, a cap. <P>SOLUTION: The method of eliminating a mask projection laser abrasion engraving defect from a metallic film deposited on a flexible carrier is provided. The method includes a process of spraying liquid compressed between about 1,500 PSI and about 3,000 PSI onto the defect. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010000500(A) 申请公布日期 2010.01.07
申请号 JP20090128145 申请日期 2009.05.27
申请人 COMMISS ENERG ATOM 发明人 BABLET JACQUELINE;BENWADIH MOHAMED
分类号 B08B3/02;H01L21/302 主分类号 B08B3/02
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