| 摘要 |
A detection apparatus determines an amount of relative rotational deviation between two different objects. Each of the objects has a respective grating mark which together form a pair of grating marks. The detection apparatus includes a detector that detects interference fringes produced by an overlap between the pair of grating marks. The detection apparatus also includes a calculation unit that determines the amount of relative rotational deviation between the two different objects from inclination of the interference fringes detected by the detector. The detection apparatus can be applied, for example, in controlling transfer of a pattern formed on a mold to a transfer material applied to a substrate. |
