发明名称 溶液吐出装置の検査方法およびデバイスの製造方法
摘要 A inspection method for a solution discharge device includes a discharge step, a imaging step, an acquisition step, and a judgement step of identifying a main drop among deposits found to have a deposit surface area falling within a deposit surface area standard for each imaging area. An upper bound and a lower bound of the deposit surface area standard are determined according to timing of imaging in the imaging step, such that the values applied to deposits in an imaging area imaged at a second imaging time that is later than a first imaging time are smaller than those applied to deposits in an imaging area imaged at the first imaging time.
申请公布号 JP6041220(B2) 申请公布日期 2016.12.07
申请号 JP20140520953 申请日期 2013.06.19
申请人 パナソニックIPマネジメント株式会社 发明人 三好 貴之
分类号 B05D1/26;B05C5/00;B05C11/00;B05D3/00;B41J2/01;H01L51/50;H05B33/10 主分类号 B05D1/26
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