LONG LIFETIME THERMAL SPRAY COATING FOR ETCHING CHAMBER AND DEPOSITION CHAMBER APPLICATION

摘要

PROBLEM TO BE SOLVED: To provide plasma processing chamber coatings that have longer lifetimes and better protection against corrosive process chemicals.SOLUTION: Aluminum 101 forming an interior surface of a plasma processing chamber is coated with a multi-layer film comprising a layer 102 of aluminum oxide (AlO), a layer 103 of stabilized zirconia (YSZ) and a layer 104 of yttrium aluminum garnet (YAG).SELECTED DRAWING: Figure 1