发明名称 |
Method for manufacturing a sensor device |
摘要 |
A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
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申请公布号 |
US7645627(B2) |
申请公布日期 |
2010.01.12 |
申请号 |
US20080011063 |
申请日期 |
2008.01.24 |
申请人 |
DELPHI TECHNOLOGIES, INC. |
发明人 |
CHRISTENSON JOHN C.;CHILCOTT DAN W.;FORESTAL RICHARD G.;GLENN JACK L.;ZARABADI SEYED R. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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