EXPOSURE FRAME MEMBER FOR AUTOMATIC EXPOSURE MACHINE

摘要

PURPOSE:To provide the inexpensive exposure frame member of an automatic exposure machine constituted so that high yield can be achieved. CONSTITUTION:The exposure frame member 40 is provided with a strong supporting frame 24 movably arranged in the automatic exposure machine and a film fitting plate 42 supported by it. The plate 42 is constituted of a hollowed plate 44 provided with an aperture at the center and a cover sheet 46 stuck on the plate 44 so as to cover the aperture. The sheet 46 is constituted of a material which is flexible and ultraviolet rays transmit through A packing 23 is disposed extending over the whole circumference of the lower surface of the frame 24 and it forms a sealed space by cooperating with the placing table 18 of a substrate 16. When the air in the sealed space is evacuated, a film 14 fitted to the plate 42 is closely brought into contact with the substrate 16 corresponding to the ruggedness of the copper pattern thereof and exposed in such a state.