| 摘要 |
<p>A plasma system which is to be coupled to a power source, and plasma system (20) including a chamber (22,27) defining an internal cavity (25) in which a plasma is generated during operation; a coil (40) which during operation couples power from the power source (60) into the plasma within the chamber, the coil having first and second terminals (42,44); a first capacitor (C1) which is coupled between the first terminal and a reference potential; and a second capacitor (C2) connected to the second terminal and through which the power source is coupled to the second terminal. <IMAGE></p> |
