发明名称 System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape
摘要 <p>A system and method for determining a shape of a surface comprises a chromatic imaging optics for generating a dispersion in a measuring light. Colour information contained in measuring light emerging from the surface to be tested and received by a detector is used to determine the shape of the surface to tested. </p>
申请公布号 EP1726914(A3) 申请公布日期 2007.01.03
申请号 EP20060005092 申请日期 2006.03.13
申请人 CARL ZEISS SMT AG 发明人 DOERBAND, BERND, DR.
分类号 G01B11/25;G01M11/02 主分类号 G01B11/25
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