| 摘要 |
PROBLEM TO BE SOLVED: To obtain better measuring images by reducing the vibration noise that exerts adverse effects on a measuring image at measurement. SOLUTION: This scanning probe microscope is equipped with a sample stand 13 for holding a sample 23, a support 12 on which the sample stand is placed, a probe 22 for receiving the physical action produced with respect to the surface of the sample; a measuring head 30 for outputting the physical action as a signal, a driving mechanism (XY-axis coarse movement mechanisms 15 and 16 and an XY-axis fine adjustment scanner 35) for scanning the probe, with respect to the surface of the sample and a driving mechanism (Z-axis coarse movement mechanism 17 and a Z-axis fine adjustment scanner 34) for changing the distance between the probe and the sample. The sample stand is connected/fixed to another member via a damping alloy spacer 19. COPYRIGHT: (C)2007,JPO&INPIT
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