Method for producing semiconductor device and a semiconductor device, more especially a membrane sensor

摘要

The semiconductor component, i.e. a micro-mechanical membrane sensor, is composed of a semiconductor carrier with a dosed zone and a membrane (240) over a cavern (250). The membrane is produced with a coherent second zone with dosing over the first, at least partially as bars, and a part of the semiconductor material is removed from the first zone. The structure is covered by a deposited monocrystalline material layer.