| 摘要 |
PROBLEM TO BE SOLVED: To improve test accuracy. SOLUTION: A probe unit 2 is disposed at the one face side of a circuit board 11 and a probe unit 3 is disposed at the other face side of the circuit board 11. Among probes 2a-2f of the probe unit 2, the corresponding two are contacted to contact points TP1-TP3 defined on wiring patterns 21-23, and among probes 3a-3d of the probe unit 3, the corresponding two are contacted to contact points TP6, TP7 defined on wiring patterns 25, 26, and the probes 3b, 3d, which are contacted to the contact points TF6 and TF7, are short-circuited. Using the probes 2a, 2c, a measuring current 11 is supplied to a group of via holes 31-33. The via holes 31-33 group are tested by measuring the resistance of the via holes 31-33 group by the 4 terminal method based on the voltage V1 between the contact points TP1 and TP3 measured using the probe 2b, 3b and the measuring current 11. COPYRIGHT: (C)2009,JPO&INPIT
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