| 摘要 |
PROBLEM TO BE SOLVED: To provide a small angle/wide angle X-ray measuring device capable of measuring simultaneously small angle X-ray scattering and wide angle X-ray scattering, and improving measurement accuracy of the wide angle X-ray scattering. SOLUTION: This small angle/wide angle X-ray measuring device has a small angle X-ray optical system for irradiating a sample S with an X-ray emitted from an X-ray source F, and detecting a scattered ray generated from the sample S in a small angle domain by a detector 26; and a wide angle X-ray optical system 7 provided between the sample S and the detector 26, for detecting the scattered ray generated from the sample S in a wide angle domain. The wide angle X-ray optical system 7 has a phosphor 38 provided on an X-ray optical path between the sample S and a detector 7, for converting an X-ray image into a visible light image; a light reflector 42 for reflecting the visible light image formed on the phosphor 38; and a photodetector 47 for detecting the visible light image reflected by the light reflector 42. Each aperture 39, 42 for the X-ray is provided respectively on each part crossing with the X-ray optical path of the phosphor 38 and the light reflector 42, and each aperture 39, 42 has an aperture diameter through which the maximum angle value of the small angle domain can be viewed. COPYRIGHT: (C)2009,JPO&INPIT
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