| 摘要 |
A mirror plate (100) for a Fabry-Perot interferometer (300) comprises: - a substrate (50), which comprises silicon (Si), - a semi-transparent reflective coating (110) implemented on the substrate (50), - a de-coupling structure (DC1) formed on the substrate (50), - a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and - a second sensor electrode (G1b), wherein the de-coupling structure (DC1) comprises an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50). |
