OPTICAL UNIT, MEASUREMENT SYSTEM, AND MEASUREMENT METHOD

摘要

The purpose of the present invention is to allow more freedom in setting a region of interest for speckle imaging using coherent light, while maintaining the necessary speckle size. The present invention provides an optical unit which projects coherent light on a region of interest for speckle imaging so that the coherent light falls incident along a pattern including bright regions and dark regions uniformly arranged in at least one direction within the region of interest. The present invention also provides a measurement system which comprises an optical unit for projecting coherent light on a region of interest so that the coherent light falls incident along a pattern including bright regions and dark regions uniformly arranged in at least one direction within the region of interest, a light receiving unit for receiving reflected light of the coherent light from the region of interest, and an imaging unit for imaging speckles in the reflected light.