| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type humidity sensor capable of being subjected to no influence by external electromagnetic induction.SOLUTION: A capacitance type humidity sensor includes: a substrate; a first electrode (11) and a second electrode (12) formed on the substrate; a measurement layer (15) provided between the first electrode (11) and the second electrode (12) and whose capacity changes according to humidity of an atmosphere; and a conductive layer (16) for covering at least part of the first electrode (11), the second electrode (12), and the measurement layer (15).SELECTED DRAWING: Figure 1 |
