发明名称 |
METHOD FOR PICKING UP CHIP |
摘要 |
<p>PURPOSE: A method for picking up a chip is provided to separate the chip from a thin film without damage to the chip by applying a lower force in separating the chip from the thin film through a moving adhesion plate. CONSTITUTION: A chip layout board is settled in the table and includes a thin film and chips which are arranged on the thin film. A fixing adhesion plate having a plurality of holes in which the air is inhaled and a moving adsorption plate absorbs the bottom of chip layout board. The adhesive force applied between chip and the thin film to be picked up is decreased. The picking up tool attracts the chip to be picked up. The moving adsorption plate draws one part of the thin film and separates the chip from the thin film.</p> |
申请公布号 |
KR20100012072(A) |
申请公布日期 |
2010.02.05 |
申请号 |
KR20080073446 |
申请日期 |
2008.07.28 |
申请人 |
TOP ENGINEERING CO., LTD. |
发明人 |
KIM, YUN GI;LEE, DUCK HO |
分类号 |
H01L21/60;H01L21/677;H01L21/68 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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