ION DETECTOR, DETECTOR ARRAY AND INSTRUMENT USING SAME

摘要

An array of ion detectors (30) comprising a plurality of pickup electrodes (20, 34) for receiving ions; a substrate (32); a plurality of insulators (22, 35) positioned respectively between said pickup electrodes (20, 34) and said substrate (32); a plurality of charge storage areas (12, 38) for storing charge received by said pickup electrodes (20, 34), wherein each area (12, 38) is connected to a particular pickup electrode (20, 34) and means (44) for determining the amount of charge collected by each charge storage area.