| 发明名称 |
METHOD AND EQUIPMENT FOR TREATING SUBSTRATE |
| 摘要 |
<p>PURPOSE: A method and equipment for treating substrate is provided to shorter the transfer time for carrying the holding vessel to the load port. CONSTITUTION: The cassette openers(220) open and close the door of cassette. The load port(420) locates at the cassette openers. The cassette logistics equipment leaves cassette or load ports. The carriage units(410,430) send back cassette between the cassette openers and the load ports.</p> |
| 申请公布号 |
KR20100012281(A) |
申请公布日期 |
2010.02.08 |
| 申请号 |
KR20080073588 |
申请日期 |
2008.07.28 |
| 申请人 |
SEMES CO., LTD. |
发明人 |
NOH, HWAN IK;YOO, SEUNG WOO |
| 分类号 |
H01L21/677;H01L21/673 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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