SENSOR DEVICE AND DIAPHRAGM STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a sensor device capable of inhibiting the enlargement of a device body while suppressing the occurrence of a deflection in a supporter. SOLUTION: The microphone (the sensor device) 30 has a diaphragm 4a fitted in a manner that the diaphragm can be vibrated, and an electrode plate 8a fitted so as to be opposed to the diaphragm 4a at a specified distance. The microphone 30 further has the supporter 5 containing a supporting film 6 supporting the electrode plate 8a, while having a tensile internal stressδSt6and the supporting film 7 being laminated on the supporting film 6 and having a compressive internal stressδSt7. COPYRIGHT: (C)2008,JPO&INPIT