| 摘要 |
A method and an apparatus for aligning substrates are provided to accurately align the substrates on specified positions by guiding alignment bars in a bracket. An apparatus for aligning substrates includes a rotating unit and a substrate aligning unit. The rotating unit rotates the substrate to a desired position. The substrate aligning unit is mounted on the rotating unit and aligns the substrate on the desired position. The substrate aligning unit includes a cylinder(103) and plural alignment bars(107). The cylinder provides operational power for moving the substrate aligning unit back and forth. The alignment bar is driven by the cylinder and adjusts the substrate at the desired position. A moving member is connected between the cylinder and the substrate alignment bar.
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