| 摘要 |
A stacker robot for transferring a cassette is provided to suck and clean fine dust and particles on a floor of a stocker by using an automatic cleaner. A stacker robot(120) for transferring a cassette(C) includes a main body(122), a moving unit(129), a pair of lifting posts(124), a lifting frame(126), an arm(128), and an automatic cleaner(130). The moving unit is installed in the main body to move along a trolley rail(136). The pair of lifting posts are vertically installed at opposite sides of the main body. The lifting frame is horizontally installed between the pair of lifting posts to be lifted. The arm is installed on the lifting frame to rotate, contract, and extend. The automatic cleaner is installed in the main body and has a suction hole.
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