| 摘要 |
Film bulk acoustic resonators (FBARs) have frame elements 204 (401, 404, fig 4A, B). Filters including these resonators connected in series and shunt are described (figs 3A, B). The frame element(s) are placed at one or more, but not all sides of the FBAR polygonal electrodes 201; 207. The frame elements provide an acoustic impedance mismatch to increase the Q of the FBAR by reflecting acoustic energy in lateral modes, thereby reducing energy loss to lateral modes. |
