| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate sucking support member and a substrate supporting method for vacuum-sucking an element forming substrate, capable of preventing the damage of an element provided on the element forming substrate due to vacuum suction of the element forming substrate. SOLUTION: The substrate sucking support member 40 has: a plurality of groove portions 61-63 for vacuum-sucking the element forming substrate 20 provided with a substrate 22 and an element 23 formed on the substrate 22; a plurality of support portions 53-55 provided between the groove portions 61-63 and contacting the element forming substrate 20; and a plurality of through holes 67-69 connected to a vacuum device via a piping 73 for vacuum and used to vacuum the groove portions 61-63. The through holes 67-69 are formed so as to penetrate through the substrate supporting portions 53-55 positioned between one side surfaces 53B, 54B, 55B of the substrate supporting portions 53-55 and the other side surfaces 53C, 54C, 55C of the substrate supporting portions 53-55. COPYRIGHT: (C)2009,JPO&INPIT |
