Lithographic apparatus and table for use in such an apparatus

摘要

An immersion lithographic apparatus includes a projection system, a first table with a first planar surface and a second table with a second planar surface, the first and second planar surfaces being substantially coplanar, a liquid confinement system configured to spatially confine an immersion liquid to a volume with a first surface area that is coplanar with the first and second planar surfaces, and is substantially smaller than a second surface area of the top surface of the substrate, and a swap bridge member attached to the first table, the swap bridge member having an upper surface that is substantially coplanar with the first and second planar surfaces, wherein the upper surface of the swap bridge member is configured to serve as part of the liquid confinement system and to deform when the swap bridge member collides with the second table and to remain attached to the first table.

主权项

1. An immersion lithographic apparatus comprising:
a projection system for supplying a patterned beam of radiation to a top surface of a substrate and via an immersion liquid accommodated between the projection system and the top surface of the substrate; a first table with a first planar surface and a second table with a second planar surface, the first planar surface and the second planar surface being substantially coplanar; a liquid confinement system configured to spatially confine the immersion liquid to a volume with a first surface area, wherein the first surface area is coplanar with the first planar surface and with the second planar surface, and is substantially smaller than a second surface area of the top surface of the substrate, and a swap bridge member attached to the first table, the swap bridge member having an upper surface that is substantially coplanar with the first planar surface and with the second planar surface; wherein the upper surface of the swap bridge member is configured to serve as part of the liquid confinement system when the immersion liquid is being transferred from one of the first table and the second table to another one of the first table and the second table, wherein the swap bridge member is configured to deform when the swap bridge member collides with the second table and to remain attached to the first table, and wherein the swap bridge member is configured to deform by bending in a direction away from an imaginary reference plane that is located between, on the one hand, the projection system and, on the other hand, the first planar surface and the second planar surface, and that is substantially perpendicular to an optical axis of the projection system, when the swap bridge member collides with the second table.