发明名称 Process for fabricating metal bus lines for OLED lighting panels
摘要 Systems and methods for the design and fabrication of OLEDs, including high-performance large-area OLEDs, are provided. Variously described fabrication processes may be used to deposit and pattern bus lines with a smooth profile and a gradual sidewall transition. Such smooth profiles may, for example, reduce the probability of electrical shorting at the bus lines. Accordingly, in certain circumstances, an insulating layer may no longer be considered essential, and may be optionally avoided altogether. In cases where an insulating layer is not used, further enhancements in the emissive area and shelf life of the device may be achieved as well. According to aspects of the invention, bus lines such as those described herein may be deposited, and patterned, using vapor deposition such as vacuum thermal evaporation (VTE) through a shadow mask, and may avoid multiple photolithography steps. Other vapor deposition systems and methods may include, among others, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD). A final profile of the bus line may substantially correspond to the profile as deposited.
申请公布号 US9397312(B2) 申请公布日期 2016.07.19
申请号 US201313788321 申请日期 2013.03.07
申请人 Universal Display Corporation 发明人 Levermore Peter;Pang Huiqing;Krall Emory;Kamala Rajan;Ma Ruiqing;Burrows Paul E.
分类号 H01L51/00;H01L51/52;H01L51/50;H01L51/56;H05B33/10;C23C14/04;C23C14/24;H01L27/32 主分类号 H01L51/00
代理机构 Morris & Kamlay LLP 代理人 Morris & Kamlay LLP
主权项 1. A light emitting panel comprising: a first electrode layer; an organic layer stack over the first electrode layer; a second electrode layer over the organic layer stack; and a plurality of bus lines in electrical contact with at least one of the first electrode layer and the second electrode layer; wherein, the plurality of bus lines are deposited by vapor deposition and include a final profile shape as deposited.
地址 Ewing NJ US