Transmission electron microscope and method of displaying TEM images

摘要

A transmission electron microscope (100) includes an electron beam source (2), an illumination lens system (4), an objective lens (8), a projector lens (12), an imager (14) for capturing the TEM image projected by the projector lens (12), a display controller (22) for causing the TEM image captured by the imager (14) to be displayed at a given size reduction percentage on a display device (20), and a control unit (24) for controlling the objective lens (8). The control unit (24) controls the amount of underfocus of the objective lens (8) on the basis of the size reduction percentage to display an edge enhanced image.

主权项

1. A transmission electron microscope comprising:
an electron beam source producing an electron beam; an illumination lens system for causing the electron beam produced from the electron beam source to impinge on a sample; an objective lens for focusing the electron beam transmitted through the sample to form a focused TEM image; a projector lens for projecting the TEM image focused by the objective lens; an imager for capturing the TEM image projected by the projector lens; a display controller for providing control such that the TEM image captured by the imager is displayed at a given size reduction percentage on a display device; and a control unit for controlling the objective lens; wherein the control unit controls an amount of underfocus of the objective lens on the basis of the size reduction percentage.