| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump temperature control device that can stabilize the temperature of a vacuum pump even if use conditions are different from design conditions.SOLUTION: A temperature control device TCD comprises: a heater power calculation unit 85 that calculates heater power P of a heater 29; a heat capacity calculation unit 86 that calculates heat capacity C of a vacuum pump 1 from the heater power P and temperature rise time of the vacuum pump 1 with the heater 29 when the heater 29 operates and a cooling device 30 does not operate; a first heat loss calculation unit 88 that calculates first heat loss Q of the vacuum pump 1 from the heat capacity C and temperature fall time of the vacuum pump 1 with the cooling device 30 when the heater 29 does not operate and the cooling device 30 operates; and a temperature control unit 83 that controls the temperature of the vacuum pump 1 on the basis of the heat capacity C and the first heat loss Q.SELECTED DRAWING: Figure 2 |
