| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask blank storage case capable of suppressing the sticking of particles to a mask blank caused by dust emission upon opening/closing of the storage case.SOLUTION: The mask blank storage case comprises: a case body 7 whose upper part is opened; and a cover body 6 covered on the case body 7, and the case body 7 and the cover body 6 respectively have fitting parts and are fitted each other, and the case stores a mask blank whose main surface has a square shape at the inside to a longitudinal direction. One confronted two parts in the opening edges of the case body 7 are provided with the fitting parts, and the other confronted two parts are provided with notches 74 suppressing the negative pressure change in the case upon opening/closing of the cover body 6. |
