Plasma processing apparatus and plasma processing method

摘要

A plasma processing apparatus that performs plasma processing on a substrate held on a transport carrier including an annular frame and a holding sheet. The apparatus includes: a process chamber; a plasma excitation device that generates plasma; a stage in the chamber; a cooling mechanism for cooling the stage; a cover that partly covers the holding sheet and the frame and has a window section through which the substrate is partly exposed to plasma; and a movement device that moves a relative position of the cover to the frame. The cover has a roof section, a cylindrical circumferential side section extending from a circumferential edge of the roof section toward the stage, and a correction member that protrudes from the roof section and/or the circumferential side section toward the frame and presses the frame onto the stage to correct warpage of the frame.

主权项

1. A plasma processing apparatus that performs plasma processing on a substrate held on a transport carrier which has an annular frame and a holding sheet, the plasma processing apparatus comprising:
a chamber that has a process chamber configured to be decompressed; a plasma excitation device that generates plasma in the process chamber; a stage in the chamber, on which the transport carrier is loaded; a cooling mechanism configured to cool the stage; a cover that covers a part of the holding sheet and at least a part of the frame of the transport carrier loaded on the stage and that has a window section through which at least a part of the substrate is exposed to plasma; and a movement device that changes a relative position of the cover with respect to the frame, wherein the cover has
a roof section that faces the frame loaded on the stage,a side section that extends from an outer edge of the roof section to a side of the stage, and a correction member that protrudes from the roof section and/or the side section toward the frame loaded on the stage and presses the frame onto the stage to correct warpage of the frame, and the correction member has at least one protruding portion that protrudes at least from the roof section toward the frame.