发明名称 検査装置および検査方法
摘要 Provided are an inspection device and an inspection method capable of achieving improved magnetic field sensitivity by using a magnetic thin film of a small film thickness. A light-emitting unit 1 emits light of a first wavelength for acquiring magnetic field inspection information and a second wavelength for acquiring inspection object surface information. A selection unit 6 selects information from an inspection object 4 and information from a magnetophotonic crystal film 3 acquired by light irradiation performed by an irradiation unit 2. An image generation unit 9 generates image data based on the magnetic field inspection information acquired with the first wavelength and the inspection object surface information acquired with the second wavelength selected by the selection unit. Each of the generated image data is displayed on a display unit 10.
申请公布号 JP6037386(B2) 申请公布日期 2016.12.07
申请号 JP20130025703 申请日期 2013.02.13
申请人 株式会社日立製作所 发明人 遠藤 久;成重 将史;井上 光輝;高木 宏幸
分类号 G01N27/83;G01N21/88 主分类号 G01N27/83
代理机构 代理人
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